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| ==Quality control of e-beam evaporated Ni films== | | ==Quality control of e-beam evaporated Ni films== |
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| {| border="1" cellspacing="2" cellpadding="2" colspan="3"
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| |bgcolor="#98FB98" |'''Quality control (QC) for Wordentec'''
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| |-
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| Nickel deposition is tested occasionally, around 1-2 times per year. LabManager links require login.
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| *[http://labmanager.dtu.dk/d4Show.php?id=3736&mach=167 QC procedure for Wordentec in LabManager]<br>
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| *[https://labmanager.dtu.dk/view_binary.php?type=data&mach=167 The newest QC data for Wordentec in LabManager]<br>
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| {| {{table}}
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| | align="center" |
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| {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:300px"
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| ! QC Recipe:
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| ! Process 5
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| |Deposition rate
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| |10 Å/s
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| |Thickness
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| |100 nm
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| |Pressure
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| |Below 4*10<sup>-6</sup> mbar
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| |-
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| |}
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| | align="center" valign="top"|
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| {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:440px"
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| !QC limits
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| !Wordentec
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| |-
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| |Measured average thickness (Å)
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| |± 10 %
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| |-
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| |Lowest accepted deposition rate (Å/s)
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| |6 Å/s
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| |-
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| |}
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| |-
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| |}
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| Thickness is measured in 5 points with a stylus profiler.
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| |}
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| {| border="1" cellspacing="2" cellpadding="2" colspan="3" | | {| border="1" cellspacing="2" cellpadding="2" colspan="3" |
| |bgcolor="#98FB98" |'''Quality control (QC) for the Temescal''' | | |bgcolor="#98FB98" |'''Quality control (QC) for the Temescal''' |
