Specific Process Knowledge/Etch/DRIE-Pegasus: Difference between revisions
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[[Image:DRIE-Pegasus.jpg |300x300px|thumb|The SPTS Pegasus in the Danchip cleanroom]] | |||
= The DRIE Pegasus at Danchip = | = The DRIE Pegasus at Danchip = | ||
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The DRIE Pegasus is a state-of-art silicon dry etcher. It offers outstanding performance in terms of etch rate, uniformity etc. This page will provide some clues. | The DRIE Pegasus is a state-of-art silicon dry etcher. It offers outstanding performance in terms of etch rate, uniformity etc. This page will provide some clues. | ||
== Documents provided by the manufacturer SPTS == | == Documents provided by the manufacturer SPTS == | ||