LabAdviser/346: Difference between revisions
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!A-1 | !A-1 | ||
|At III-V RIE | |At III-V RIE | ||
|55 804 | |4525 55 804 | ||
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!Ax2 | !Ax2 | ||
|At the Lesker | |At the Lesker | ||
|55 815 | |4525 55 815 | ||
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!A-5 | !A-5 | ||
|In the corner near the furnace/plasma asher | |In the corner near the furnace/plasma asher | ||
|55 803 | |4525 55 803 | ||
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!B-1 | !B-1 | ||
|In the corridor, on the wall | |In the corridor, on the wall | ||
|55 806 | |4525 55 806 | ||
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!C-1 | !C-1 | ||
|In the corridor, on the wall | |In the corridor, on the wall | ||
|55 808 | |4525 55 808 | ||
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!D-1 | !D-1 | ||
|In the gowning area (entrance room) | |In the gowning area (entrance room) | ||
|55 703 | |4525 55 703 | ||
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!D-3 | !D-3 | ||
|At the KOH | |At the KOH | ||
|55 940 | |4525 55 940 | ||
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!E-1 | !E-1 | ||
|By the e-beam computers | |By the e-beam computers | ||
|55 943 | |4525 55 943 | ||
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!E-5/E-4 | !E-5/E-4 | ||
|By the MLAs in E-5, by mask aligner in E-4 | |By the MLAs in E-5, by mask aligner in E-4 | ||
|55 946 | |4525 55 946 | ||
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!E-6 | !E-6 | ||
|Furnace 6" | |Furnace 6" | ||
|55 948 | |4525 55 948 | ||
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!F-1 | !F-1 | ||
|III-V growth | |III-V growth | ||
|55 949 | |4525 55 949 | ||
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!F-2 | !F-2 | ||
|To the right of the XRD and Ellipsometer | |To the right of the XRD and Ellipsometer | ||
|55 941 | |4525 55 941 | ||
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!F-3 | !F-3 | ||
|DUV Stepper | |DUV Stepper | ||
|55 947 | |4525 55 947 | ||
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!Basement 901 | !Basement 901 | ||
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool | |Hot Embosser, XRD RotAnode, Laser Micromachining Tool | ||
|55 812 | |4525 55 812 | ||
|- | |- | ||
|-style="background:WhiteSmoke; color:black" | |-style="background:WhiteSmoke; color:black" | ||
!Basement 904 | !Basement 904 | ||
|To the right of the AFM | |To the right of the AFM | ||
|55 813 | |4525 55 813 | ||
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Revision as of 20:48, 17 June 2025
The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.
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DTU Nanolab - Building 346/347
DTU Nanolab has several locations on the Lyngby campus, building 346/347 and 314/307.
Buildings 346 and 347 (formerly know as DTU Danchip) hosts the cleanroom and related offices, as well as the PolyFabLab and SupportLab (photo).
Buildings 314 and 307 (formerly know as DTU CEN) hosts most of the electron microscopes (SEMs and TEMs), and related offices together with some labs, and preparation equipment. More information about our electron microscopy characterization cababilities can be found here.
Building 346:
- Ground: Cleanroom
- First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop)
- Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1)
Building 347:
- Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab
- First Floor: Offices, Kantine
- Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab)
Please note, due to reconstruction, upgrades, purchases, decommision of equipment or for other reasons, equipment may be moved from the location specified below. Please have a look at www.labmanager.dk under "Basic Info" and "Location" for an updated location.
Cleanroom (Ground Floor in B346) - Layout and Contacts
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Basement Labs (Basement in B346) - Layout and Contacts
PolyFabLab and SupportLab (Ground Floor in B347) - Layout and Contacts
