Specific Process Knowledge/Lithography/EBeamLithography/FirstEBL: Difference between revisions
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=Job file verification= | =Job file verification= | ||
To ensure that the pattern and exposure parameters are correct the MGN file should always be verified to some extent. It is rarely feasible or necessary to manually validate all parts of a design but one should at least inspect a few parts of the pattern to verify it looks correct and also verify that pattern placement is as expected. This can be done using the Array Check Program '''(ACHK)''' found on the '''Analysis''' pane. The '''Analysis''' pane is usually open on the right hand side of the second desktop, if not, it can be opened from the '''EBX Menu.''' Pattern check can be done by the following procedure | To ensure that the pattern and exposure parameters are correct the MGN file should always be verified to some extent. It is rarely feasible or necessary to manually validate all parts of a design but one should at least inspect a few parts of the pattern to verify it looks correct and also verify that pattern placement is as expected. This can be done using the Array Check Program '''(ACHK)''' found on the '''Analysis''' pane. The '''Analysis''' pane is usually open on the right hand side of the second desktop, if not, it can be opened from the '''EBX Menu.''' Pattern check can be done by the following procedure: | ||
*Open '''ACHK''' from the '''Analysis''' pane | *Open '''ACHK''' from the '''Analysis''' pane | ||
*Click “File” -> “Open” and open your magazine file | *Click “File” -> “Open” and open your magazine file | ||
*The pattern placement is now shown. Zoom into the pattern by left click and drag a box to zoom | *The pattern placement is now shown. Zoom into the pattern by left click and drag a box to zoom in | ||
*Click an instance of the pattern, it changes color to red | *Click an instance of the pattern, it changes color to red | ||
*To the | *To see the actual pattern of the selected instance click '''View''' -> '''Shot shape display...''' | ||
*In '''Shot shape display''' click '''Simulation''' | *In '''Shot shape display''' click '''Simulation''' | ||
*Change the '''Objective aperture''' on the drop down to the correct aperture, in this case aperture 6 and click '''OK'''. This will set the correct beam size for visualization | *Change the '''Objective aperture''' on the drop down to the correct aperture, in this case aperture 6 and click '''OK'''. This will set the correct beam size for visualization | ||