Specific Process Knowledge/Characterization/Tencor P17: Difference between revisions

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	==Tencor P17 Stylus Profiler==		= Tencor P17 Stylus Profiler =

	The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as for measuring [[Specific_Process_Knowledge/Characterization/Stress_measurement\|stress]].		The P17 Stylus Profiler from KLA Tencor is used in a similar manner to the Dektak XTA for profiling surfaces with structures in the micro- and submicrometer range as well as for measuring [[Specific_Process_Knowledge/Characterization/Stress_measurement\|stress]].