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Specific Process Knowledge/Characterization/Tencor P17: Difference between revisions

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NLAB-Employees-701, NLAB-LabmanagerAllUsers, Administrators
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Compared to the DektakXT, the P17 has more advanced options for stress measurements: It allows the user to measure a stress map with up to 5° radial resolution. Programming and analyzing a sequence of predefined scans in fixed locations on a wafer is also easier and the manual for doing it much better for the P17 than for the DektakXT. A disadvantage of the P17 is that is can be hard to locate structures as the maximum field of view of the camera is 1x1.5 mm. We recommend having a map of the sample design available so you can easily locate the features of interest. Otherwise the P17 is easy to use, fast, and accurate, just like the DektakXT.
Compared to the DektakXT, the P17 has more advanced options for stress measurements: It allows the user to measure a stress map with up to 5° radial resolution. Programming and analyzing a sequence of predefined scans in fixed locations on a wafer is also easier and the manual for doing it much better for the P17 than for the DektakXT. A disadvantage of the P17 is that is can be hard to locate structures as the maximum field of view of the camera is 1x1.5 mm. We recommend having a map of the sample design available so you can easily locate the features of interest. Otherwise the P17 is easy to use, fast, and accurate, just like the DektakXT.


'''The user manual, quality control procedure and results, technical information and contact information can be found in LabManager:'''
The user manual, quality control procedure and results, technical information and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=486 LabManager].
 
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=486 P17 page in LabManager]


===Process information ===
===Process information ===


*Info about [[//Dektak_XTA Measurement Accuracy]] (''measured with Dektak XTA'').
*Info about [//Dektak_XTA Measurement Accuracy] (''measured with Dektak XTA'').


*Using the analysis software: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]]
*Using the analysis software: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]]
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