Jump to content

Specific Process Knowledge/Characterization/Tencor P17: Difference between revisions

Mmat (talk | contribs)
Mmat (talk | contribs)
Line 11: Line 11:
===Process information ===
===Process information ===


*Info about [[/Dektak XTA|measurement accuracy]] (measured with Dektak XTA).
*Info about [[//Dektak_XTA Measurement Accuracy]] (''measured with Dektak XTA'').


*Using the analysis software: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]]
*Using the analysis software: [[Specific_Process_Knowledge/Characterization/Profiler/Apex software|Apex software access & tips]]