Specific Process Knowledge/Characterization/Dektak XTA: Difference between revisions

@@ Line 47: / Line 47: @@
 |style="background:LightGrey; color:black"|Height accuracy z (95 % confidence)
 |style="background:WhiteSmoke; color:black"|
-~ 2 % for a 1 µm step with the smallest measurement range and ~ 1 % for a 25 µm step ''for well-defined steps that are easy to measure'' (read about reducing and estimating the measurement uncertainty [[/Stylus profiler measurement uncertainty|here]])
+~ 2 % for a 1 µm step with the smallest measurement range and ~ 1 % for a 25 µm step "for well-defined steps that are easy to measure"
 |-
 |style="background:LightGrey; color:black"|Max scan depth as a function of trench width W
@@ Line 70: / Line 70: @@
 |-
 |}
 ==Measurement Accuracy==