Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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==Ellipsometer VASE and Ellipsometer M-2000V == | ==Ellipsometer VASE and Ellipsometer M-2000V == | ||
''This section is written by Berit Herstrøm @ DTU Nanolab'' | ''This section is written by Berit Herstrøm @ DTU Nanolab'' | ||
[[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom | [[image:Ellipsometer_VASE_image.JPG|275x275px|right|thumb|Ellipsometer VASE: positioned in cleanroom C-1, {{photo1}}]] | ||
The ellipsometer VASE is actually a M2000XI-210 ellipsometer from J.A. Woollam Co., Inc.. We call it VASE (Variable Angle Spectroscopic Ellipsometry) because it can do spectroscopic ellipsometry at variable angles. <br/> | The ellipsometer VASE is actually a M2000XI-210 ellipsometer from J.A. Woollam Co., Inc.. We call it VASE (Variable Angle Spectroscopic Ellipsometry) because it can do spectroscopic ellipsometry at variable angles. <br/> | ||