Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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The aluminium etch has two steps: | The aluminium etch has two steps: | ||
; Breakthrough | |||
: The breakthrough is designed to break through the native aluminium oxide layer that is present on all aluminium surfaces. | |||
==Etching of nanostructures in silicon using the ICP Metal Etcher or DRIE Pegasus== | ==Etching of nanostructures in silicon using the ICP Metal Etcher or DRIE Pegasus== | ||