Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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= The ICP Metal Etcher = | == The ICP Metal Etcher in short == | ||
Despite it's name the metal etcher doesn't | |||
==Etching of nanostructures in silicon using the ICP Metal Etcher or DRIE Pegasus== | ==Etching of nanostructures in silicon using the ICP Metal Etcher or DRIE Pegasus== | ||