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Specific Process Knowledge/Thermal Process/C2 Furnace III-V oxidation: Difference between revisions

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'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=88  III-V Oxidation furnace (C2)]'''
'''[http://www.labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=88  III-V Oxidation furnace (C2)]'''


==Process knowledge==
==Overview of the performance of the General Purpose Annealing furnace and some process related parameters==
*[[Specific_Process_Knowledge/Thermal_Process/Oxidation/Oxidation_on_III-V_oxidation_furnace_(C2)|Standard wet oxidation recipe on the III-V oxidation furnace]]
 
==Overview of the performance of the III-V oxidation furnace and some process related parameters==




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