Specific Process Knowledge/Process Flow: Difference between revisions
| Line 195: | Line 195: | ||
== Special Requirements == | == Special Requirements == | ||
<span style="background:#FF2800">THIS PART IS UNDER CONSTRUCTION</span> | |||
* | You might have special requirements in your process that require | ||
* chemicals not already approved and/or available in the cleanroom | |||
* parameters that are not available on our machines | |||
* process outside our allowed parameter range | |||
* others special requirements. | |||
In this section we try to elaborate on a few of these topics. Some might have been mentioned in the [[LabAdviser/Safety#"DTU Nanolab Introductory Course: Cleanroom in B346"|DTU Nanolab Introductory Course: Cleanroom in B346]]. If you still have questions, please contact out [mailto:training@nanolab.dtu.dk Fabrication Support Team]. | |||
Approval by DTU Nanolabs safety representant required) | |||
* Special materials, resists, developers, solvents, or etchants, please ... discuss with nanolab staff, fill out APV, buy yourself | * Special materials, resists, developers, solvents, or etchants, please ... discuss with nanolab staff, fill out APV, buy yourself | ||
* Standard chemicals are available in the cleanroom (find a list here) | * Standard chemicals are available in the cleanroom (find a list here) | ||
* UV or DUV Masks: link | * UV or DUV Masks: link | ||
* cleanroom shelf space | * cleanroom shelf space | ||