Specific Process Knowledge/Process Flow: Difference between revisions
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* Check cross-contamination with pre- and post process equipment | * Check cross-contamination with pre- and post process equipment | ||
''' | |||
'''Deposit a Thin Film on your Sample (Metal Evaporation)''' | |||
*Specify metal thicknesses, and deposition rate | *Specify metal thicknesses, and deposition rate | ||
*Specify Evaporator equipment, process name | *Specify Evaporator equipment, process name | ||
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*Check cross-contamination with pre- and post process equipment | *Check cross-contamination with pre- and post process equipment | ||
''' | |||
'''Transfer a Pattern to your Sample (Dry etching) ''' | |||
* Specify Etching Tool | * Specify Etching Tool | ||
* Specify process name, etch parameters, etch depth | * Specify process name, etch parameters, etch depth | ||