Specific Process Knowledge/Process Flow: Difference between revisions
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You can download a process flow template below and fill it in with your own information. Of course, you are also welcome to make your own template. You are also welcome to take a look at our example for the fabrication of a simple solar cell. It shows you how to build up a process flow for a component that can be made at DTU Nanolab. Throughout the example, you can find links to relevant pages in LabAdviser where information about the different processes are given. Please note that there is also a possibility to create a process flow in Labmanger using the [http://labmanager.dtu.dk/function.php?module=Flow&view=editflow Flow editor].<br> | You can download a process flow template below and fill it in with your own information. Of course, you are also welcome to make your own template. You are also welcome to take a look at our example for the fabrication of a simple solar cell. It shows you how to build up a process flow for a component that can be made at DTU Nanolab. Throughout the example, you can find links to relevant pages in LabAdviser where information about the different processes are given. Please note that there is also a possibility to create a process flow in Labmanger using the [http://labmanager.dtu.dk/function.php?module=Flow&view=editflow Flow editor].<br> | ||
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'''Process flow template:''' [[Media:Process flow template v3.1.docx|Process_flow_template_v3.1.docx]] | '''Process flow template:''' [[index.php?title=Media:Process flow template v3.1.docx|Process_flow_template_v3.1.docx]] | ||
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Examples for Information relevant to a Specific Process Step | |||
Please find below some examples that might help you to create a complete process step. | === Examples for Information relevant to a Specific Process Step === | ||
Please find below some examples that might help you to create a complete process step. If you need assistance, feel free to contact training@nanolab.dtu.dk. | |||
'''Create a Mask on your Sample (Photolithography Step)''' | |||
** Specify the design/mask-name, -layers, and polarity used for each photolithography step | ** Specify the design/mask-name, -layers, and polarity used for each photolithography step | ||
** Specify if required and type of alignment (frontside, backside), and if relevant note down alignment marks coordinates | ** Specify if required and type of alignment (frontside, backside), and if relevant note down alignment marks coordinates | ||