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Line 71: |
| image:WF_2E09a_mar23_2011-150.jpg|'''nano1.42:''' The 150 nm trenches etched 120 seconds | | image:WF_2E09a_mar23_2011-150.jpg|'''nano1.42:''' The 150 nm trenches etched 120 seconds |
| image:WF_2E09b_mar23_2011-150.jpg|'''pxnano2:''' The 150 nm trenches etched 96 seconds | | image:WF_2E09b_mar23_2011-150.jpg|'''pxnano2:''' The 150 nm trenches etched 96 seconds |
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| {| {{table}} align="left"
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| | align="center" style="background:#f0f0f0;"|'''Nominal trench line width'''
| |
| | align="center" style="background:#f0f0f0;"|''''''
| |
| | align="center" style="background:#f0f0f0;"|'''30'''
| |
| | align="center" style="background:#f0f0f0;"|'''60'''
| |
| | align="center" style="background:#f0f0f0;"|'''90'''
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| | align="center" style="background:#f0f0f0;"|'''120'''
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| | align="center" style="background:#f0f0f0;"|'''150'''
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| | align="center" style="background:#f0f0f0;"|'''Average'''
| |
| | align="center" style="background:#f0f0f0;"|'''Std. dev.'''
| |
| |-
| |
| | Etch rates||nm/min||149||161||166||169||170||163||9
| |
| |-
| |
| | Sidewall angle||degs||91||91||90||90||90||90||0
| |
| |-
| |
| | CD loss||nm/edge||3||-11||-12||-34||-36||-18||17
| |
| |-
| |
| | CD loss foot||nm/edge||9||1||1||-20||-9||-4||11
| |
| |-
| |
| | Bowing||||4||4||2||6||2||4||2
| |
| |-
| |
| | Bottom curvature||||-46||-40||-37||-31||-23||-35||9
| |
| |-
| |
| | zep||nm/min||||||||||||66||
| |
| |-
| |
| |
| |
| |}
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| {| {{table}} align="right"
| |
| | align="center" style="background:#f0f0f0;"|'''Nominal trench line width'''
| |
| | align="center" style="background:#f0f0f0;"|''''''
| |
| | align="center" style="background:#f0f0f0;"|'''30'''
| |
| | align="center" style="background:#f0f0f0;"|'''60'''
| |
| | align="center" style="background:#f0f0f0;"|'''90'''
| |
| | align="center" style="background:#f0f0f0;"|'''120'''
| |
| | align="center" style="background:#f0f0f0;"|'''150'''
| |
| | align="center" style="background:#f0f0f0;"|'''Average'''
| |
| | align="center" style="background:#f0f0f0;"|'''Std. dev.'''
| |
| |-
| |
| | Etch rates||nm/min||215||232||240||243||244||235||12
| |
| |-
| |
| | Sidewall angle||degs||90||89||89||89||89||89||0
| |
| |-
| |
| | CD loss||nm/edge||1||-10||-11||-33||-33||-17||15
| |
| |-
| |
| | CD loss foot||nm/edge||6||2||1||-19||-6||-3||10
| |
| |-
| |
| | Bowing||||4||2||4||3||1||3||1
| |
| |-
| |
| | Bottom curvature||||-36||-29||-22||-19||-17||-25||8
| |
| |-
| |
| | zep||nm/min||||||||||||51||
| |
| |-
| |
| |
| |
| |}
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| Line 162: |
Line 105: |
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| {| {{table}} align="right" | | {| {{table}} align="center" |
| | align="center" style="background:#f0f0f0;"|'''Nominal trench line width''' | | | align="center" style="background:#f0f0f0;"|'''Nominal trench line width''' |
| | align="center" style="background:#f0f0f0;"|'''''' | | | align="center" style="background:#f0f0f0;"|'''''' |
