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* First Floor: Offices, Kantine
* First Floor: Offices, Kantine
* Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab)
* Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab)
<br>
<br>
== Cleanroom (Ground Floor in B346) - Layout and Contacts ==
{| style="color: black;" width="100%"
| colspan="2" |
|-
| style="width: 50%"|
{| style="color: black;" width="100%"
| colspan="2" |
|-
| style="width: 40%"|
[[image:Cleanroom_naming_2017.jpg|500px|thumb|link=|Drawing: DTU CAS Digital]]
|}
| style="width: 50%"|
{|border="1" cellspacing="1" cellpadding="1" style="text-align:left;"
|-
|-
|-style="background:silver; color:black"
!Room number
!Location
!Phone number
|-
|-
|-style="background:WhiteSmoke; color:black"
!A-1
|At III-V RIE
|55 804
|-
|-
|-style="background:LightGrey; color:black"
!Ax2
|At the Lesker
|55 815
|-
|-
|-style="background:WhiteSmoke; color:black"
!A-5
|In the corner near the furnace/plasma asher
|55 803
|-
|-
|-style="background:LightGrey; color:black"
!B-1
|In the corridor, on the wall
|55 806
|-
|-
|-style="background:WhiteSmoke; color:black"
!C-1
|In the corridor, on the wall
|55 808
|-
|-
|-style="background:LightGrey; color:black"
!D-1
|In the gowning area (entrance room)
|55 703
|-
|-
|-style="background:WhiteSmoke; color:black"
!D-3
|At the KOH
|55 940
|-
|-
|-style="background:LightGrey; color:black"
!E-1
|By the e-beam computers
|55 943
|-
|-
|-style="background:WhiteSmoke; color:black"
!E-5/E-4
|By the MLAs in E-5, by mask aligner in E-4
|55 946
|-
|-
|-style="background:LightGrey; color:black"
!E-6
|Furnace 6"
|55 948
|-
|-
|-style="background:WhiteSmoke; color:black"
!F-1
|III-V growth
|55 949
|-
|-
|-style="background:LightGrey; color:black"
!F-2
|To the right of the XRD and Ellipsometer
|55 941
|-
|-
|-style="background:WhiteSmoke; color:black"
!F-3
|DUV Stepper
|55 947
|-
|-
|-style="background:LightGrey; color:black"
!Basement 901
|Hot Embosser, XRD RotAnode, Laser Micromachining Tool
|55 812
|-
|-style="background:WhiteSmoke; color:black"
!Basement 904
|To the right of the AFM
|55 813
|-
|}
|}
<br clear="all"/>
== Basement Labs (Basement in B346) - Layout and Contacts ==
[[file:Basement 346 phase 1.jpg|left|700px|thumb|link=|Drawing: DTU CAS Digital]]
<br clear="all"/>
<br>
<br>
== PolyFabLab and SupportLab (Ground Floor in B347) - Layout and Contacts ==
[[file:Floor Plan 347 ground.png|left|700px|thumb|link=|Drawing: DTU CAS Digital ''(modified on 21/05/2025)'']]
<br clear="all"/>

Revision as of 09:07, 23 May 2025

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The content on this page, including all images and pictures, was created by DTU Nanolab staff, unless otherwise stated.

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DTU Nanolab - Building 346/347

Building 346 (cleanroom) and 347, Photo: DTU Nanolab


DTU Nanolab has several locations on the Lyngby campus.

Buildings 346 and 347 (formerly know as DTU Danchip) hosts the cleanroom and related offices, as well as the PolyFabLab and SupportLab (photo).

Buildings 314 and 307 (formerly know as DTU CEN) hosts most of the electron microscopes, and related offices together with some labs, and preparation equipment. More information about our electron microscopy characterization cababilities can be found here.


Building 346:

  • Ground: Cleanroom
  • First Floor: Several spedcial Labs (e.g. Wet Chemistry Lab, Phoenix Lab) and Fabrication and Characterization equipment (e.g. Dicing Tools, SEM TableTop)
  • Basement: Fabrication and Characterization equipment (e.g. Hot Embosser, Laser Micromachining Tool, XRD Anode, AFM, XPS, SEM1)


Building 347:

  • Ground Floor: DTU Nanolab Administration, PolyFabLab, SupportLab (previously PackLab), PDMS Lab
  • First Floor: Offices, Kantine
  • Basement: Several spedcial Labs (e.g. Optics Lab, Plasma Lab, Physics Lab)



Cleanroom (Ground Floor in B346) - Layout and Contacts

Drawing: DTU CAS Digital
Room number Location Phone number
A-1 At III-V RIE 55 804
Ax2 At the Lesker 55 815
A-5 In the corner near the furnace/plasma asher 55 803
B-1 In the corridor, on the wall 55 806
C-1 In the corridor, on the wall 55 808
D-1 In the gowning area (entrance room) 55 703
D-3 At the KOH 55 940
E-1 By the e-beam computers 55 943
E-5/E-4 By the MLAs in E-5, by mask aligner in E-4 55 946
E-6 Furnace 6" 55 948
F-1 III-V growth 55 949
F-2 To the right of the XRD and Ellipsometer 55 941
F-3 DUV Stepper 55 947
Basement 901 Hot Embosser, XRD RotAnode, Laser Micromachining Tool 55 812
Basement 904 To the right of the AFM 55 813


Basement Labs (Basement in B346) - Layout and Contacts

Drawing: DTU CAS Digital




PolyFabLab and SupportLab (Ground Floor in B347) - Layout and Contacts

Drawing: DTU CAS Digital (modified on 21/05/2025)