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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142-pxnano2: Difference between revisions

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Bureaucrats, danchip, Administrators
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Bureaucrats, danchip, Administrators
1,918 edits
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| Time
| Time
| 120 secs
| 120 secs
| colspan="2" | D: 3 secs, E: 5 secs, total 12 cycles, 96 secs
| colspan="2" | D: 3 secs, E: 5 secs, total 12 cycles or 96 secs
|-
|-
! rowspan="3" align="center"| Conditions
! rowspan="3" align="center"| Conditions
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