Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142-pxnano2: Difference between revisions
Appearance
| Line 7: | Line 7: | ||
! pxnano2 | ! pxnano2 | ||
|- | |- | ||
! | ! colspan="2"| Tool | ||
| Pegasus | | Pegasus | ||
| ASE | | ASE | ||
| Line 7: | Line 7: | ||
! pxnano2 | ! pxnano2 | ||
|- | |- | ||
! | ! colspan="2"| Tool | ||
| Pegasus | | Pegasus | ||
| ASE | | ASE | ||