Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142-pxnano2: Difference between revisions
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{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|- | |- | ||
! | |||
! | |||
! nano1.42 | ! nano1.42 | ||
! pxnano2 | ! pxnano2 | ||
|- | |- | ||
! | |||
! Tool | ! Tool | ||
! Pegasus | ! Pegasus | ||
! ASE | ! ASE | ||
|- | |- | ||
! rowspan="6" align="center"| Recipe | ! rowspan="6" align="center"| Recipe | ||
| Gas | | Gas | ||