Specific Process Knowledge/Cross Contamination: Difference between revisions
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We have created a cross contamination sheet available in Labmanager as a guideline regarding which materials are allowed to enter an equipment. It is also possible to show the cross contamination between two tools. You can find more information below. | We have created a cross contamination sheet available in Labmanager as a guideline regarding which materials are allowed to enter an equipment. It is also possible to show the cross contamination between two tools. You can find more information below. | ||
Cross contamination can origin from many different sources: the substrate | Cross contamination can origin from many different sources: the substrate itself, films deposited or grown on top of the substrate, traces from previous processes, and the environment. To make it easier for our users, we have sorted them into groups according to the sources of contamination. | ||
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