Specific Process Knowledge/Cross Contamination: Difference between revisions
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== Cross Contamination Groups in LabManager == | == Cross Contamination Groups in LabManager == | ||
We have created a cross contamination sheet available in | We have created a cross contamination sheet available in Labmanager as a guideline regarding which materials are allowed to enter an equipment. It is also possible to show the cross contamination between two tools. You can find more information below. | ||
Cross contamination can origin from many different sources: the substrate, films deposited or grown on top of the substrate, traces from previous processes, and the environment. To make it easier for our users, we have grouped them into groups | Cross contamination can origin from many different sources: the substrate '''itself''', films deposited or grown on top of the substrate, traces from previous processes, and the environment. To make it easier for our users, we have <s>grouped</s> '''divided/sorted''' them into groups according to the sources of contamination. | ||
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== How to Access the Cross Contamination Sheet == | == How to Access the Cross Contamination Sheet == | ||
Please note that some cross contamination sheets might be outdated. If you are | Please note that some cross contamination sheets might be outdated. If you are unsure whether you are allowed to process your wafer in a specific equipment, please contact [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | ||
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* Are there process dependent attributes or traces added or removed? ([[image:xccaution.png|15px|frameless|link=]]) | * Are there process dependent attributes or traces added or removed? ([[image:xccaution.png|15px|frameless|link=]]) | ||
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As you can see from the screenshot above, you are not allowed to process a sample in the "Si Etch 1: KOH" bath (our cleanest KOH etch bath) that has been previously processed in "PECVD03". Your sample might have picked up traces of material list 3, f.ex. silver, gold, or copper during processing in the PECVD03. Since those contaminants can alter the etching process and | As you can see from the screenshot above, you are not allowed to process a sample in the "Si Etch 1: KOH" bath (our cleanest KOH etch bath) that has been previously been processed in "PECVD03". Your sample might have picked up traces of material list 3, f.ex. silver, gold, or copper during processing in the PECVD03. Since those contaminants can alter the etching process and, even more, contaminate samples processed in "Si Etch 1: KOH", they are forbidden. | ||