Specific Process Knowledge/Cross Contamination: Difference between revisions
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To evaluate the viability of your process and cross contamination of your sample, you have to consider | To evaluate the viability of your process and cross contamination of your sample, you have to consider | ||
* Is your sample with its particular attributes allowed in the tool? ( | * Is your sample with its particular attributes allowed in the tool? ('''"In"''') | ||
* Does the tool contaminate your sample during processing? ( | * Does the tool contaminate your sample during processing? ([[image:xcplus.png|15px|frameless|link=]] '''"Out +"''') | ||
* Does the tool remove a particular attribute from your sample during processing? ('''"Out -"''') | * Does the tool remove a particular attribute from your sample during processing? ([[image:xcminus.png|15px|frameless|link=]] '''"Out -"''') | ||
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Please note, a processed sample can be coated with more than one film. For some processes, only the top layer may be evaluated with respect to cross contamination, f.ex. if buried layers are not exposed during the process and traces can be disregarded for the process. But for other processes, all layers need to be evaluated, f.ex. if you etch through several layers, you will expose underlying material. In that case, all layers need to be considered for the cross contamination. Please contact the equipment responsible group or [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk], if you have multilayer substrates and you are in doubt if you can process your sample in the respective tool. | Please note, a processed sample can be coated with more than one film. For some processes, only the top layer may be evaluated with respect to cross contamination, f.ex. if buried layers are not exposed during the process and traces can be disregarded for the process. But for other processes, all layers need to be evaluated, f.ex. if you etch through several layers, you will expose underlying material. In that case, all layers need to be considered for the cross contamination. Please contact the equipment responsible group or [mailto:nanolabsupport@nanolab.dtu.dk nanolabsupport@nanolab.dtu.dk], if you have multilayer substrates and you are in doubt if you can process your sample in the respective tool. | ||
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== How to Access the Cross Contamination Sheet == | == How to Access the Cross Contamination Sheet == | ||
Please note that some cross contamination sheets might be outdated. If you are in doubt if you are allowed to process your wafer in a specific equipment, please contact [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | Please note that some cross contamination sheets might be outdated. If you are in doubt if you are allowed to process your wafer in a specific equipment, please contact [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk]. | ||