Specific Process Knowledge/Cross Contamination: Difference between revisions

# Extend Equipment Life

#* Clean systems are less prone to corrosion, clogging, or mechanical failure.

== Cross Contamination Sheet in LabManager ==

We have created a cross contamination sheet available in labmanager as a guideline regarding which materials are allowed to enter an equipment. It is also possible to show the cross contamination between two tools.  

''Attention: Please note that some cross contamination sheets might be outdated. If you are in doubt if you are allowed to process your wafer in a specific equipment, please contact '''training@nanolab.dtu.dk'''.''  

=== How to access the cross contamination sheet ===

* Go to the “Equipment Info” page  

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===  If you want to see the cross contamination between two tools ===

* commonly the tool you selected is set as default, else click on "Select other equipment"

As you can see from the overivew, it is not allowed to go with a sample processed in "PECVD03" to "Si Etch 1: KOH" (our cleanest KOH etch bath) as you sample - might - pick up contaminants of material list 3, such as silver, gold, or copper, and others in the PECVD03. Since those contaminants can alter the etching process and further contaminate samples processed in "Si Etch 1: KOH", they are forbidden.

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