Specific Process Knowledge/Cross Contamination: Difference between revisions
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== How to use the system in LabManager == | == How to use the system in LabManager == | ||
== | == ''Why care about cross contamination?'' == | ||
'' | == ''The principle behind the Cross Contamination system.'' == | ||
== ''An example – Details of the Cross Contamination sheet'' == | |||
'' | == ''How does it affect my work in the clean room?'' == | ||
== Cross Contamination Sheet in LabManager == | |||
We have created a cross contamination sheet available in labmanager as a guideline regarding which materials are allowed to enter an equipment. It is also possible to show the cross contamination between two tools. | |||
'' | ''Attention: Please note that some cross contamination sheets might be outdated. If you are in doubt if you are allowed to process your wafer in a specific equipment, please contact '''training@nanolab.dtu.dk'''.'' | ||