Specific Process Knowledge/Cross Contamination: Difference between revisions
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* Select the tool | * Select the tool | ||
* Click on the button “Cross Contamination Sheet” | * Click on the button “Cross Contamination Sheet” | ||
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[[image:cross_contamination.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | [[image:cross_contamination.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | ||
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* commonly the tool you selected is set as default, else click on "Select other equipment" | * commonly the tool you selected is set as default, else click on "Select other equipment" | ||
* click on "Select "TO" equipment" | * click on "Select "TO" equipment" | ||
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[[image:cross_contamination_between.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | [[image:cross_contamination_between.png|800px|frameless|Example for a cross contamination sheet for the PECVD03]] | ||