Specific Process Knowledge/Direct Structure Definition: Difference between revisions
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* [[Specific Process Knowledge/Back-end processing/Disco Saw|Dicing saw]] | * [[Specific Process Knowledge/Back-end processing/Disco Saw|Dicing saw]] | ||
* Dry Etching without mask | * Dry Etching without mask | ||
== Materials for structuring == | == Materials for structuring == | ||
*Polymers | *Polymers | ||
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** [[Specific Process Knowledge/Back-end processing/Disco Saw|Dicing saw]] | ** [[Specific Process Knowledge/Back-end processing/Disco Saw|Dicing saw]] | ||
**[[Specific Process Knowledge/Back-end processing/Sandblasting|Sandblasting (at DTU Nanotech).]] | **[[Specific Process Knowledge/Back-end processing/Sandblasting|Sandblasting (at DTU Nanotech).]] | ||
<BR> | <BR> | ||
== Comparison of equipment/material == | == Comparison of equipment/material == | ||