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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano11: Difference between revisions

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1,918 edits
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| align="center" style="background:#f0f0f0;"|'''Std'''
| align="center" style="background:#f0f0f0;"|'''Std'''
|-
|-
| ER||nm/min||183||218||232||249||256||228||29
| Etch rates||nm/min||183||218||232||249||256||228||29
|-
|-
| SA||degs||95||94||94||93||93||94||1
| Sidewall angle||degs||95||94||94||93||93||94||1
|-
|-
| base||nm/edge||-2||-4||-16||-15||-27||-13||10
| Cd loss ||nm/edge||-2||-4||-16||-15||-27||-13||10
|-
|-
| foot||nm/edge||-2||-4||-16||-15||3||-7||9
| CD loss foot||nm/edge||-2||-4||-16||-15||3||-7||9
|-
|-
| Bowing||||36||40||49||48||40||42||6
| Bowing||||36||40||49||48||40||42||6
|-
|-
| Curve||||-55||-50||-39||-39||-42||-45||7
| Curvature||||-55||-50||-39||-39||-42||-45||7
|-
|-
| zep||nm/min||||||||||||172||
| zep||nm/min||||||||||||172||
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