Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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*[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch on DRIE-Pegasus]] | *[[Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch|Nanoetch on DRIE-Pegasus]] | ||
*[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano1|1 - the first nanoetch]] | *[[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano1|1 - the first nanoetch]] | ||
{| border="2" cellspacing="1" cellpadding="3" align="center" | |||
!Recipe Sinano | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano3|3.0]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano31|3.1]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano32|3.2]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan33|3.3]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano34|3.4]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano4|4.0]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano35|3.5]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinano36|3.6]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan33-2|3.3]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan37|3.7]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan331|3.31]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan331-2|3.31]] | |||
![[Specific Process Knowledge/Etch/ICP Metal Etcher/Sinan332|3.32]] | |||
|- | |||
! colspan="14" align="center"| Etch rates (nm/min) | |||
|- | |||
| Averages||311||104||92||105||116||169||108||79||101||66||91||98||59 | |||
|- | |||
| Std. Dev||44||15||15||21||22||9||11||31||29||4||28||18||12 | |||
|- | |||
! colspan="14" align="center"| Zep etch rate (nm/min) | |||
|- | |||
| || ||30||40||51||67|| || ||45||59|| ||53||36||19 | |||
|- | |||
! colspan="14" align="center"| Sidewall angle (degrees) | |||
|- | |||
| Averages||82||82||82||82||82||84||81||83||83||85||80||83||79 | |||
|- | |||
| Std. Dev||2||2||1||1||1||1||1||2||2||1||3||2||2 | |||
|- | |||
! colspan="14" align="center"| CD loss (nm pr edge) | |||
|- | |||
| Averages||65||-11||-15||-2||-11||67||63||-29||-5||-29||10||-14||-17 | |||
|- | |||
| Std. Dev||30||5||2||4||3||29||27||6||5||8||7||8||10 | |||
|- | |||
! colspan="14" align="center"| Bowing (nm) | |||
|- | |||
| Averages||31||31||15||6||5||22||12||15||28||13||25||1||-2 | |||
|- | |||
| Std. Dev||6||7||3||6||4||5||2||6||9||7||5||2||2 | |||
|- | |||
! colspan="14" align="center"| Botton curvature | |||
|- | |||
| Averages||-9||-6||-9||-11||-9||9||-4||-8||-24||-2||-9||-13||-10 | |||
|- | |||
| Std. Dev||22||19||19||11||7||17||15||15||12||15||13||17||18 | |||
|- | |||
|} | |||