Specific Process Knowledge/Lithography/UVLithography: Difference between revisions
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# Developing the exposed resist to reveal the transferred pattern | # Developing the exposed resist to reveal the transferred pattern | ||
DTU Nanolab offers a number of automatic and manual coaters, mask or maskless exposure tools, as well as automatic or semi-automatic developers. | DTU Nanolab offers a number of automatic and manual coaters, mask or maskless exposure tools, as well as automatic or semi-automatic developers.<br clear=all /> | ||
= Getting started = | = Getting started = | ||