Specific Process Knowledge/Etch/Etching of Silicon Nitride: Difference between revisions
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![[Specific Process Knowledge/Etch/Wet Silicon Nitride Etch|Wet Silicon Nitride Etch]] | ![[Specific Process Knowledge/Etch/Wet Silicon Nitride Etch|Wet Silicon Nitride Etch]] | ||
![[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|BHF]] | ![[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|BHF]] | ||
!Pegasus 4 | ![[Specific_Process_Knowledge/Etch/DRIE-Pegasus/Pegasus-4|Pegasus 4]] | ||
![[Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)|AOE (Advanced Oxide Etch)]] | ![[Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)|AOE (Advanced Oxide Etch)]] | ||
![[Specific Process Knowledge/Etch/ASE_(Advanced_Silicon_Etch)|ASE]] | ![[Specific Process Knowledge/Etch/ASE_(Advanced_Silicon_Etch)|ASE]] | ||