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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions

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| Std. Dev||12||10||11||14||15||15||16||15||21
| Std. Dev||12||10||11||14||15||15||16||15||21
|-
|-
|! colspan="10" align="center"| Bowing (nm)
! colspan="10" align="center"| Bowing (nm)
|-
|-
| Averages||31||42||13||16||6||6||3||-3||0
| Averages||31||42||13||16||6||6||3||-3||0
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