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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions

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| Std. Dev||36||29||37||20||9||9||9||8||6
| Std. Dev||36||29||37||20||9||9||9||8||6
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! colspan="10" align="center"| Zep etch rate (nm/min)
|-
| ||0||172||95||94||69||67||101||65||55
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! colspan="10" align="center"| Sidewall angle (degrees)
! colspan="10" align="center"| Sidewall angle (degrees)
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