Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions
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| Std. Dev||36||29||37||20||9||9||9||8||6 | | Std. Dev||36||29||37||20||9||9||9||8||6 | ||
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! colspan=" | ! colspan="10" align="center"| Sidewall angle (degrees) | ||
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| Averages||93||94||92||94||91||91||90||90||90 | | Averages||93||94||92||94||91||91||90||90||90 | ||
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| Std. Dev||1||1||0||1||0||0||1||0 | | Std. Dev||1||1||0||1||0||0||1||0||0 | ||
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! colspan=" | ! colspan="10" align="center"| CD loss (nm pr edge) | ||
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| Averages||-11||-13||-17||-10||-10||-10||-20||-13||-24 | | Averages||-11||-13||-17||-10||-10||-10||-20||-13||-24 | ||
| Line 117: | Line 117: | ||
| Std. Dev||12||10||11||14||15||15||16||15||21 | | Std. Dev||12||10||11||14||15||15||16||15||21 | ||
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|! colspan=" | |! colspan="10" align="center"| Bowing (nm) | ||
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| Averages||31||42||13||16||6||6||3||-3 | | Averages||31||42||13||16||6||6||3||-3||0 | ||
|- | |- | ||
| Std. Dev||7||6||4||3||2||2||2||3||1 | | Std. Dev||7||6||4||3||2||2||2||3||1 | ||
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! colspan=" | ! colspan="10" align="center"| Botton curvature | ||
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| Averages||-45||-45||-44||-43||-32||-32||-34||-32||-39 | | Averages||-45||-45||-44||-43||-32||-32||-34||-32||-39 | ||