Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions

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 ! colspan="9" align="center"| Etch rates (nm/min)
 |-
-| Averages||295||228||299||235||183||183||166||160||148||0||0||0||0
+| Averages||295||228||299||235||183||183||166||160||148
 |-
-| Std. Dev||36||29||37||20||9||9||9||8||6||0||0||0||0
+| Std. Dev||36||29||37||20||9||9||9||8||6
 |-
 ! colspan="9" align="center"| Sidewall angle (degrees)
 |-
-| Averages||93||94||92||94||91||91||90||90||90||0||0||0||0
+| Averages||93||94||92||94||91||91||90||90||90
 |-
-| Std. Dev||1||1||0||1||0||0||1||0||0||0||0||0||0
+| Std. Dev||1||1||0||1||0||0||1||0
 |-
 ! colspan="9" align="center"| CD loss (nm pr edge)
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-| Averages||-11||-13||-17||-10||-10||-10||-20||-13||-24||0||0||0||0
+| Averages||-11||-13||-17||-10||-10||-10||-20||-13||-24
 |-
-| Std. Dev||12||10||11||14||15||15||16||15||21||0||0||0||0
+| Std. Dev||12||10||11||14||15||15||16||15||21
 |-
 |! colspan="9" align="center"| Bowing (nm)
 |-
-| Averages||31||42||13||16||6||6||3||-3||0||0||0||0||0
+| Averages||31||42||13||16||6||6||3||-3
 |-
-| Std. Dev||7||6||4||3||2||2||2||3||1||0||0||0||0
+| Std. Dev||7||6||4||3||2||2||2||3||1
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 ! colspan="9" align="center"| Botton curvature
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-| Averages||-45||-45||-44||-43||-32||-32||-34||-32||-39||0||0||0||0
+| Averages||-45||-45||-44||-43||-32||-32||-34||-32||-39
 |-
-| Std. Dev||5||7||4||9||10||10||9||8||9||0||0||0||0
+| Std. Dev||5||7||4||9||10||10||9||8||9
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 ! Images