Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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| Std. Dev||44||15||15||21||22||9||11||31||29||4||28||18||12 | | Std. Dev||44||15||15||21||22||9||11||31||29||4||28||18||12 | ||
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! colspan="14" align="center"| Zep etch rate (nm/min) | |||
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| || ||30||40||51||67|| || ||45||59|| ||53||36||19 | |||
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! colspan="14" align="center"| Sidewall angle (degrees) | ! colspan="14" align="center"| Sidewall angle (degrees) | ||