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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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| Etch rates (nm/min)||||||||||||||||||||||||||
| Etch rates (nm/min)||||||||||||||||||||||||||
|-
|-
| Averages||311||104||92||105||116||169||108||79||101||66||91||98||59
! Averages||311||104||92||105||116||169||108||79||101||66||91||98||59
|-
|-
| Std. Dev||44||15||15||21||22||9||11||31||29||4||28||18||12
! Std. Dev||44||15||15||21||22||9||11||31||29||4||28||18||12
|-
|-
| Sidewall angle (degrees)||||||||||||||||||||||||||
! Sidewall angle (degrees)||||||||||||||||||||||||||
|-
|-
| Averages||82||82||82||82||82||84||81||83||83||85||80||83||79
! Averages||82||82||82||82||82||84||81||83||83||85||80||83||79
|-
|-
| Std. Dev||2||2||1||1||1||1||1||2||2||1||3||2||2
! Std. Dev||2||2||1||1||1||1||1||2||2||1||3||2||2
|-
|-
| CD loss (nm pr edge)||||||||||||||||||||||||||
! CD loss (nm pr edge)||||||||||||||||||||||||||
|-
|-
| Averages||65||-11||-15||-2||-11||67||63||-29||-5||-29||10||-14||-17
! Averages||65||-11||-15||-2||-11||67||63||-29||-5||-29||10||-14||-17
|-
|-
| Std. Dev||30||5||2||4||3||29||27||6||5||8||7||8||10
! Std. Dev||30||5||2||4||3||29||27||6||5||8||7||8||10
|-
|-
| Bowing (nm)||||||||||||||||||||||||||
| Bowing (nm)||||||||||||||||||||||||||
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