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Deposition of SiN with PECVD4/NEW TESTS QC: Difference between revisions

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[[File:25W - reflected power QC nitride.png|left|thumb|596x596px|Reflected power of different tests, whit 25W as the demanded power.]]
[[File:25W - reflected power QC nitride.png|thumb|596x596px|Reflected power of different tests, whit 25W as the demanded power.|center]]