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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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|180
|180
|-
|-
! colspan="15" align="center"| Etch rates (nm/min)
|-
|-
! Averages
| Averages||311||104||92||105||116||169||108||79||101||66||91||98||59
| 311
| 104
| 92
| 105
| 116
| 169  
| 108
| 79  
| 101
| 66
| 91
| 98
| 59  
|-
|-
! Std. Dev.
| Std. Dev||44||15||15||21||22||9||11||31||29||4||28||18||12
|44
|15
|15
|21
|22
|9
|11
|31
|29
|4
|28
|18
|12
|-
|-
! colspan="15" align="center"| Sidewall angle (degrees)
| Sidewall angle (degrees)||||||||||||||||||||||||||
|-
|-
! Averages
| Averages||82||82||82||82||82||84||81||83||83||85||80||83||79
|82
|82
|82
|82
|82
|84
|81
|83
|83
|85
|80
|83
|79
|-
|-
! Std. Dev
| Std. Dev||2||2||1||1||1||1||1||2||2||1||3||2||2
|2
|2
|1
|1
|1
|1
|1
|2
|2
|1
|3
|2
|2
|-
|-
! colspan="15" align="center"| CD loss (nm pr edge)
| CD loss (nm pr edge)||||||||||||||||||||||||||
|-
|-
! Averages
| Averages||65||-11||-15||-2||-11||67||63||-29||-5||-29||10||-14||-17
|65
| -11
| -15
| -2
| -11
| 67
| 63
| -29
| -5
| -29
| 10
| -14
| -17
|-
|-
! Std. Dev
| Std. Dev||30||5||2||4||3||29||27||6||5||8||7||8||10
|30
|5
|2
|4
|3
|29
|27
|6
|5
|8
|7
|8
|10
|-
|-
| Avg||311||104||92||105||116||169||108||79||101||66||91||98||59
| Bowing (nm)||||||||||||||||||||||||||
|-
|-
| std||44||15||15||21||22||9||11||31||29||4||28||18||12
| Averages||31||31||15||6||5||22||12||15||28||13||25||1||-2
|-
|-
| SA||||||||||||||||||||||||||
| Std. Dev||6||7||3||6||4||5||2||6||9||7||5||2||2
|-
|-
| Avg||82||82||82||82||82||84||81||83||83||85||80||83||79
| Botton curvature||||||||||||||||||||||||||
|-
|-
| std||2||2||1||1||1||1||1||2||2||1||3||2||2
| Averages||-9||-6||-9||-11||-9||9||-4||-8||-24||-2||-9||-13||-10
|-
|-
| CD loss||||||||||||||||||||||||||
| Std. Dev||22||19||19||11||7||17||15||15||12||15||13||17||18
|-
| Avg||65||-11||-15||-2||-11||67||63||-29||-5||-29||10||-14||-17
|-
| std||30||5||2||4||3||29||27||6||5||8||7||8||10
|-
| Bowing||||||||||||||||||||||||||
|-
| Avg||31||31||15||6||5||22||12||15||28||13||25||1||-2
|-
| std||6||7||3||6||4||5||2||6||9||7||5||2||2
|-
| Curve||||||||||||||||||||||||||
|-
| Avg||-9||-6||-9||-11||-9||9||-4||-8||-24||-2||-9||-13||-10
|-
| std||22||19||19||11||7||17||15||15||12||15||13||17||18
|-
|-


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