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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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Line 157: Line 157:
|180
|180
|-
|-
! colspan="15" align="center"| Etch rates (nm)
! colspan="15" align="center"| Etch rates (nm/min)
|-
|-
! Averages
! Averages
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! Averages
! Averages
|65
|65
|-11
| -11
|-15
| -15
|-2
| -2
|-11
| -11
|67
| 67
|63
| 63
|-29
| -29
|-5
| -5
|-29
| -29
|10
| 10
|-14
| -14
|-17
| -17
|-
|-
! Std. Dev
! Std. Dev
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|10
|10
|-
|-
| Avg||311||104||92||105||116||169||108||79||101||66||91||98||59
|-
| std||44||15||15||21||22||9||11||31||29||4||28||18||12
|-
| SA||||||||||||||||||||||||||
|-
| Avg||82||82||82||82||82||84||81||83||83||85||80||83||79
|-
| std||2||2||1||1||1||1||1||2||2||1||3||2||2
|-
| CD loss||||||||||||||||||||||||||
|-
| Avg||65||-11||-15||-2||-11||67||63||-29||-5||-29||10||-14||-17
|-
| std||30||5||2||4||3||29||27||6||5||8||7||8||10
|-
| Bowing||||||||||||||||||||||||||
|-
| Avg||31||31||15||6||5||22||12||15||28||13||25||1||-2
|-
| std||6||7||3||6||4||5||2||6||9||7||5||2||2
|-
| Curve||||||||||||||||||||||||||
|-
| Avg||-9||-6||-9||-11||-9||9||-4||-8||-24||-2||-9||-13||-10
|-
| std||22||19||19||11||7||17||15||15||12||15||13||17||18
|-
|}
|}


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