Specific Process Knowledge/Lithography/Descum: Difference between revisions
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You can manipulate two different descum process development parameters: you can either change power or chamber pressure. | You can manipulate two different descum process development parameters: you can either change power or chamber pressure. | ||
==Power | ==Power testing - AZ MiR 701== | ||
[[image:AZMIR701_power_settings.png|400px|thumb|Descum results for different power settings]] | [[image:AZMIR701_power_settings.png|400px|thumb|Descum results for different power settings]] | ||
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==Pressure | ==Pressure testing - AZ MiR 701== | ||
[[image:AZMIR701_pressure_settings.png|400px|thumb|Descum results for different pressure settings]] | [[image:AZMIR701_pressure_settings.png|400px|thumb|Descum results for different pressure settings]] | ||
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|} | |} | ||
== | ==Pressure testing - AZ 5214E== | ||
[[image:AZ5214E_pressure_settings.png|400px|thumb|Descum results for different pressure settings]] | [[image:AZ5214E_pressure_settings.png|400px|thumb|Descum results for different pressure settings]] | ||