Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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! colspan=" | ! colspan="15" align="center"| Etch rates (nm) | ||
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! Averages | ! Averages | ||
| 311 | | 311 | ||
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|- | |- | ||
! colspan=" | ! colspan="15" align="center"| Etch rates (nm) | ||
|- | |||
! Averages | ! Averages | ||
| 311 | | 311 | ||