Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
Appearance
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! colspan="14" align="center"| Etch rates (nm) | ! colspan="14" align="center"| Etch rates (nm) | ||
! Averages | ! Averages | ||
| 311 | | 311 | ||
| 104 | | 104 | ||