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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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Jml (talk | contribs)
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! colspan="14" align="center"| Etch rates (nm)
! colspan="14" align="center"| Etch rates (nm)
! Averages
! Averages
|-
| 311
| 311
| 104
| 104