Specific Process Knowledge/Lithography/Descum: Difference between revisions
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| style="text-align: left;" | Pre-descum film thickness range [nm]: || 11 || 12 || 10 || 11 || 9 | | style="text-align: left;" | Pre-descum film thickness range [nm]: || 11 || 12 || 10 || 11 || 9 | ||
|- | |- | ||
| style="text-align: left;" | Pre- | | style="text-align: left;" | Pre-dscum non-uniformity [%]: || 0.37 || 0.40 || 0.33 || 0.37 || 0.30 | ||
|- | |- | ||
| style="text-align: left;" | Post-descum film thickness range [nm]: || 10 || 10 || 12 || 19 || 33 | | style="text-align: left;" | Post-descum film thickness range [nm]: || 10 || 10 || 12 || 19 || 33 | ||
|- | |- | ||
| style="text-align: left;" | Post- | | style="text-align: left;" | Post-descum non-uniformity [%]: || 0.33 || 0.33 || 0.41 || 0.66 || 1.18 | ||
|} | |} | ||