Specific Process Knowledge/Lithography/Descum: Difference between revisions
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[[File:PA_descum_single_v3.png|400px|thumb|Ashing amount and ashing rate when processing a single 100 mm wafer.|right]] | [[File:PA_descum_single_v3.png|400px|thumb|Ashing amount and ashing rate when processing a single 100 mm wafer.|right]] | ||
{| class="wikitable" | {| class="wikitable" style="text-align: center;" | ||
|+ style="caption-side: top; text-align: left;" | Ashing amount and rate | |+ style="caption-side: top; text-align: left;" | Ashing amount and rate | ||
|- | |- | ||
! Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15 | ! style="text-align: left;" | Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15 | ||
|- | |- | ||
| Ashing amount [nm]: || 5.2 || 6.2 || 35.1 || 72.3 || 87.1 | | style="text-align: left;" | Ashing amount [nm]: || 5.2 || 6.2 || 35.1 || 72.3 || 87.1 | ||
|- | |- | ||
| Ashing rate [nm/min]: || 5.2 || 3.1 || 7.0 || 7.2 || 5.8 | | style="text-align: left;" | Ashing rate [nm/min]: || 5.2 || 3.1 || 7.0 || 7.2 || 5.8 | ||
|} | |} | ||
{| class="wikitable" | {| class="wikitable" style="text-align: center;" | ||
|+ style="caption-side: top; text-align: left;" | Ashing non-uniformity | |+ style="caption-side: top; text-align: left;" | Ashing non-uniformity | ||
|- | |- | ||
! Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15 | ! style="text-align: left;" | Ashing time [min]: !! 1 !! 2 !! 5 !! 10 !! 15 | ||
|- | |- | ||
| Film thickness range, before descum [nm]: || 11 || 12 || 10 || 11 || 9 | | style="text-align: left;" | Film thickness range, before descum [nm]: || 11 || 12 || 10 || 11 || 9 | ||
|- | |- | ||
| Pre-ashing non-uniformity [%]: || 0.37 || 0.40 || 0.33 || 0.37 || 0.30 | | style="text-align: left;" | Pre-ashing non-uniformity [%]: || 0.37 || 0.40 || 0.33 || 0.37 || 0.30 | ||
|- | |- | ||
| Film thickness range, after descum [nm]: || 10 || 10 || 12 || 19 || 33 | | style="text-align: left;" | Film thickness range, after descum [nm]: || 10 || 10 || 12 || 19 || 33 | ||
|- | |- | ||
| Post-ashing non-uniformity [%]: || 0.33 || 0.33 || 0.41 || 0.66 || 1.18 | | style="text-align: left;" | Post-ashing non-uniformity [%]: || 0.33 || 0.33 || 0.41 || 0.66 || 1.18 | ||
|} | |} | ||