Specific Process Knowledge/Lithography/Strip: Difference between revisions
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'''Typical stripping parameters''' | '''Typical stripping parameters'''<br> | ||
Tested with 1.5 µm AZ 5214E on 100 mm silicon substrate. | Tested with 1.5 µm AZ 5214E on 100 mm silicon substrate. | ||
*O<sub>2</sub>: 100 sccm | *O<sub>2</sub>: 100 sccm | ||