Specific Process Knowledge/Pattern Design: Difference between revisions
mNo edit summary |
|||
| Line 72: | Line 72: | ||
Give each layer appropriate GDS number respectively CIF names before exporting the file. This is done by double click on the layers and fill out the window that pops up. | Give each layer appropriate GDS number respectively CIF names before exporting the file. This is done by double click on the layers and fill out the window that pops up. | ||
We can also provide guidance regarding the mask design phase. Please contact the mask team for help and review, E-mail address can be found in [[ | We can also provide guidance regarding the mask design phase. Please contact the mask team for help and review, E-mail address can be found in [[LabAdviser#Contact_Information_for_the_DTU_Nanolab_(Cleanroom)|Contact Information for the DTU Nanolab]]. | ||
*[[Media:Maskordering_in_Fusion.pdf| How to order and attach design files in DTU Fusion]] | *[[Media:Maskordering_in_Fusion.pdf| How to order and attach design files in DTU Fusion]] | ||
*[[mask_spec| Templates for 5" and 7" mask specifications]] | *[[mask_spec| Templates for 5" and 7" mask specifications]] | ||
<BR> | <BR> | ||
== QC masks (DTU Nanolab)== | == QC masks (DTU Nanolab)== | ||