Specific Process Knowledge/Direct Structure Definition: Difference between revisions
Appearance
mNo edit summary |
|||
| Line 15: | Line 15: | ||
* [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool|Laser Micromachining Tool/ablation]] | * [[Specific Process Knowledge/Back-end processing/Laser Micromachining Tool|Laser Micromachining Tool/ablation]] | ||
* [[Specific Process Knowledge/Back-end processing/Disco Saw|Dicing saw]] | * [[Specific Process Knowledge/Back-end processing/Disco Saw|Dicing saw]] | ||
* Dry Etching without mask | |||
<!-- | <!-- | ||
== Materials for structuring == | == Materials for structuring == | ||