Specific Process Knowledge/Pattern Design: Difference between revisions
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Install CleWin 5 software on your local computer: [[Specific Process Knowledge/Pattern Design/CleWin|Click here for guidelines.]] | Install CleWin 5 software on your local computer: [[Specific Process Knowledge/Pattern Design/CleWin|Click here for guidelines.]] | ||
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=== Layout file format=== | === Layout file format=== | ||
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* For '''DUV-lithography''' and DUV-lithography it is necessary to have physical masks (reticles) produced based on the layout file. The file format has to be GDS. For more details concerning the design of reticles see [[Specific_Process_Knowledge/Lithography/DUVStepperLithography#Process_information|Design of Reticles]]. | * For '''DUV-lithography''' and DUV-lithography it is necessary to have physical masks (reticles) produced based on the layout file. The file format has to be GDS. For more details concerning the design of reticles see [[Specific_Process_Knowledge/Lithography/DUVStepperLithography#Process_information|Design of Reticles]]. | ||
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== Mask Design for UV-lithography == | == Mask Design for UV-lithography == | ||
Here you can find tips and tricks for mask designing. | |||
* [[Media:Beginners_guide_to_mask_design_using_Clewin_v1.4.pdf|"Beginners guide to mask design"]]. This is a guide how to design a set of mask. | * [[Media:Beginners_guide_to_mask_design_using_Clewin_v1.4.pdf|"Beginners guide to mask design"]]. This is a guide how to design a set of mask. | ||
* [[Media:Guide to mask making.pdf | Guide to mask making.pdf]]. Unfortunately this is quite old guide to mask design, but may be useful anyway. Note some links/e-mails etc. are not correct anymore and the mask specifications (CU/CD, DF/BF, RR/WR) are no longer valid. | * [[Media:Guide to mask making.pdf | Guide to mask making.pdf]]. Unfortunately this is quite old guide to mask design, but may be useful anyway. Note some links/e-mails etc. are not correct anymore and the mask specifications (CU/CD, DF/BF, RR/WR) are no longer valid. | ||
* [[Media:Mask polarity and orientation.pdf | Mask polarity and orientation.pdf]]. This is an short guide how to specify the polarity and orientation of the mask when ordering as well as when used on our maskless aligners. Be aware that the specification of polarity and orientation when ordering at Compugraphics is not the same as when ordering at Delta Mask as we used to do. | * [[Media:Mask polarity and orientation.pdf | Mask polarity and orientation.pdf]]. This is an short guide how to specify the polarity and orientation of the mask when ordering as well as when used on our maskless aligners. Be aware that the specification of polarity and orientation when ordering at Compugraphics is not the same as when ordering at Delta Mask as we used to do. | ||
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===Alignment marks=== | ===Alignment marks=== | ||
The following alignment marks are suggested to use on the Mask aligners for good pattern recognition. Pleased be adviced that they can be removed in KOH etching. | The following alignment marks are suggested to use on the Mask aligners for good pattern recognition. Pleased be adviced that they can be removed in KOH etching. | ||