Specific Process Knowledge/Wafer Information: Difference between revisions
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== Wafer Information == | == Wafer Information == | ||
DTU Nanolab has a stock of standard silicon and glass wafers | DTU Nanolab has a stock of standard silicon and glass wafers, as well as somes wafers pre-processed in one of our thermal furnaces. The most commonly used wafers are located in the wafer cupboard in cleanroom B-1. DTU Nanolab always tries to have new deliveries of wafers on stock. They will be available when the previous delivery has been used. Other substrates have to be purchased personally, though you are very welcome to ask us for help if needed. | ||
=== Wafers available in DTU Nanolabs cleanroom === | === Wafers available in DTU Nanolabs cleanroom === | ||
A full list of wafers can be found in the [http://labmanager.danchip.dtu.dk/function.php?module=Wafer&view=shop&page_id=16| wafer shop in Labmanager]. The typical | A full list of wafers can be found in the [http://labmanager.danchip.dtu.dk/function.php?module=Wafer&view=shop&page_id=16| wafer shop in Labmanager]. The typical specifications of our standard wafers are listet below. | ||
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<sup>{{fn|1}}</sup> Pre-processed wafers are wafers with various thicknesses | <sup>{{fn|1}}</sup> Pre-processed wafers are wafers with various thicknesses of thermal oxides, LPCVD nitrides and Poly Si. Please consult the [http://labmanager.danchip.dtu.dk/function.php?module=Wafer&view=shop&page_id=16| wafer shop in Labmanager]for details. | ||